Arno Steckenborn
Principal Investigator
Dr. Arno Steckenborn studied and worked on his thesis at RWTH Aachen, Germany on Physics of Semiconductors with special emphasis on investigation of relaxation processes in bulk materials and quantum structures using Cathodoluminescence in the SEM. After a short 3 years time at the Heinrich Hertz Institute in Berlin with work on integrated optics, he joined Siemens Corporate Technology in the department Planar Optics and Micromechanics. For low cost fabrication of optical devices, an extensive experience of MEMS processes was gained which was subsequently first applied for development of micro fluidic devices in EU- and national funded projects and then exploited into systems of Siemens business units. Amongst the developed products are a novel small and extremely fast process gas chromatograph (MicroSAM™, SiTrans CV™ with fluidic switching structures and a miniaturized thermal conductivity detector) and a modular synthesis system for pharmaceuticals and fine chemical development and production (SiProcess™ with special mixing and other unit operations, pressure and mass flow sensors), presented on the Achema 2006.
WP8 leader: Final set up of implemented micro device for actual production and process validation
